Polymeric waveguide Bragg grating filter using soft lithography
نویسندگان
چکیده
منابع مشابه
Polymeric waveguide Bragg grating filter using soft lithography.
We use the soft lithography technique to fabricate a polymeric waveguide Bragg grating filter. Master grating structure is patterned by e-beam lithography. Using an elastomeric stamp and capillary action, uniform grating structures with very thin residual layers are transferred to the UV curable polymer without the use of an imprint machine. The waveguide layer based on BCB optical polymer is f...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2006
ISSN: 1094-4087
DOI: 10.1364/oe.14.010228